APA Citation

Ghazaryan, L. (2017). Nanoporous thin films made by atomic layer deposition and molecular layer deposition : Applications as antireflection coatings and for encapsulation gratings / von M. Sc. Lilit Ghazaryan: Applications as antireflection coatings and for encapsulation gratings. Jena.

Chicago Style Citation

Ghazaryan, Lilit. Nanoporous Thin Films Made By Atomic Layer Deposition and Molecular Layer Deposition : Applications As Antireflection Coatings and for Encapsulation Gratings / Von M. Sc. Lilit Ghazaryan: Applications As Antireflection Coatings and for Encapsulation Gratings. Jena, 2017.

MLA Citation

Ghazaryan, Lilit. Nanoporous Thin Films Made By Atomic Layer Deposition and Molecular Layer Deposition : Applications As Antireflection Coatings and for Encapsulation Gratings / Von M. Sc. Lilit Ghazaryan: Applications As Antireflection Coatings and for Encapsulation Gratings. Jena, 2017.

Warning: These citations may not always be 100% accurate.